SI-10FA Analog Mass Flow Controller/Meter

SI-10FA Analog Mass Flow Controller-Meter

The SI-10FA Analog Mass Flow Controller/Meter consists of a mass flow sensor, laminar flow stratification components, a flow controller regulating valve, and an amplification control circuit. It utilizes the thermal conductivity distribution effect, where the flowing fluid transfers heat, altering the temperature distribution of the measuring capillary wall.

The SI-10FA measures the mass flow rate of gas using the temperature difference calorimetry principle before and after capillary heat transfer, unaffected by temperature or pressure. The flow signal measured by the sensor is amplified and compared with a set voltage. The difference is used to drive the regulating valve, creating a closed-loop control to ensure the flow rate through the channel equals the set flow rate.

★★★★★

  • Short delivery time
  • Better price
  • Customizable parameters

Features

  • Thermal principle, fast response, high accuracy;
  • Tubular flow divider, resistant to clogging;
  • Suitable for various low- and high-pressure pipelines;
  • Short warm-up time, minimal zero drift, high reliability;
  • Analog input/output, compatible with secondary meters or flow computers for flow control and display.

Specifications

Low Range:

Technical SpecificationsSI-10FA-LC Mass Flow ControllerSI-10FA-LM Mass Flow Meter
Range5SCCM ~ 30SLM
Accuracy±1.0%F.S
Temperature: ±1℃
Linearity±0.5%F.S
Repeatability±0.2%F.S
Response Time<2s<1.5s
Analog Output0 ~ 5V、4 ~ 20mA
Power Supply±15VDC，24VDC
Operating Temperature0 ~ 50℃
Operating PressureOperating differential pressure: 0.05 ~ 0.5MPaOperating pressure drop: <30 kPa
Maximum Pressure Rating3MPa/10MPa
Electrical ConnectionDB9 
Leak Rate1×10^-9 SCCSHe
Temperature Coefficient±0.015%F.S/℃
Base MaterialStainless steel
Seal MaterialFluororubber, neoprene rubber, nitrile rubber
Connectionφ3, φ6, 1/8”, 1/4”

Mid-range:

Technical SpecificationsSI-10FA-MC Mass Flow ControllerSI-10FA-MM Mass Flow Meter
Range30SLM-150SLM
Accuracy±1.0%F.S
Temperature: ±1℃
Linearity±0.5%F.S
Repeatability±0.2%F.S
Response Time<2s<1.5s
Analog Output0 ~ 5V、4-20mA
Power Supply±15VDC，24VDC
Operating Temperature0 ~ 50℃
Operating PressureOperating differential pressure: 0.05 ~ 0.5MPaOperating pressure drop: <30 kPa
Maximum Pressure Rating3MPa/10MPa
Electrical ConnectionDB9
Leak Rate1×10^-9SCCSHe
Temperature Coefficient±0.015%F.S/℃
Base MaterialStainless steel
Seal MaterialFluororubber, neoprene rubber, nitrile rubber
Connectionφ8, φ10, φ12

Dimensions

  • SI-10FA-LC Mass Flow Controller

    SI-10FA-LC Mass Flow Controller

  • SI-10FA-LM Mass Flow Meter Dimensions
    SI-10FA-LM Mass Flow Meter Dimensions
  • SI-10FA-MC Mass Flow Controller Dimensions
    SI-10FA-MC Mass Flow Controller Dimensions
  • SI-10FA-MM Mass Flow Meter Dimensions
    SI-10FA-MM Mass Flow Meter Dimensions

Order Guide

Serial NumberSI-10FA-L (Low Range)      SI-10FA-M (Medium Range)
Product Type【C】Mass Flow Controller      【M】Mass Flow Meter
Pressure Rating Range【M】3MPa                    【Z】10MPa (Flowmeter only)
Flow Rate Range【005C】5SCCM             【010C】10SCCM             【020C】20SCCM             【030C】30SCCM
【050C】50SCCM           【100C】100SCCM           【200C】200SCCM           【300C】300SCCM
【500C】500SCCM         【001L】1SLM                  【002L】2SLM                 【003L】3SLM
【005L】5SLM               【010L】10SLM                【020L】20SLM
【030L】30SLM        【050L】50SLM           【100L】100SLM         【150L】150SLM
Measured MediumSee density reference table for details
Flow Input Signal【A1】0~5VDC               【A2】4~20mA
Output Signal【B1】0~5VDC               【B2】4~20mA
Supply Voltage【5】±15VDC                 【4】24VDC
Seal Material【V】Fluoroelastomer                   【T】Nitrile Rubber                  【N】Neoprene                 【Y】Other
Connection Type【A】φ3             【B】φ6               【C】φ8
【D】φ10                        【E】φ12              【F】1/8“”                   【G】1/4“”                   【Y】Other (Contact manufacturer)
Selection ExampleSI-10FA-M    M    M    020L    007    A1    B1    5    V    C

Can the Flow Range of an Analog Mass Flow Controller/Meter Be Changed?

SI-10FA Analog Mass Flow Controller-Meter Calibration
  1. Changing the flow range of an MFC usually involves replacing critical components (such as the distributor valve orifice) and recalibrating the flow range precisely. Therefore, user-mandated flow range changes are generally not recommended and are quite difficult.
  2. Flow range changes should be performed by the manufacturer or their authorized service centers to ensure accuracy and reliability. If the user believes the initial flow range selection is inappropriate, it is recommended to contact the supplier or original manufacturer for professional support.
  3. When changing the flow range, the compatibility of the flow display device must be considered simultaneously:
    • If the flow display is in percentage (%) mode, the display device generally does not require adjustment.
    • If the flow display is in absolute units (such as SCCM, SLM) mode, the display device usually needs to be adjusted accordingly to match the new flow range.
    • Alternatively, the display device can be left unadjusted, and the displayed flow reading can be multiplied by a calibrated correction factor to obtain the actual flow value.

Connecting Analog Mass Flow Controller/Meter to a Computer

A computer can be directly connected to an MFC (Mass Flow Controller), or it can be connected to an MFC via a flow meter. For analog gas mass flow controllers, a conversion board is generally required on the computer. The analog-to-digital converter receives the flow measurement value, and the digital-to-analog converter outputs the flow setpoint signal. These conversion boards are readily available in the industrial control product market.

If the gas mass flow controller is directly connected to a computer, the user needs to provide the power supply (which must have strong anti-interference capabilities).

Technical Support

A thermal mass flow meter is an instrument that directly measures the mass flow rate of a fluid based on the principle of thermal diffusion, unaffected by temperature and pressure fluctuations. It is primarily used for the measurement and control of gas flow.

A thermal mass flow meter is an instrument that detects flow rate using the principle of heat transfer and diffusion. It measures the gas flow rate by measuring the cooling effect as gas flows through a heating element inside the flow meter.

There are two thermal resistance elements in the measuring section through which the gas passes. One acts as a temperature sensor, and the other as a heater. The temperature sensor detects the gas temperature, while the heater maintains a constant temperature difference between itself and the measured gas by changing the current.

As the gas flow rate increases, the cooling effect becomes greater, requiring a larger current to maintain a constant temperature between the thermal resistance elements. This heat transfer is proportional to the gas mass flow rate; that is, there is a corresponding functional relationship between the supplied current and the gas mass flow rate to reflect the gas flow rate.

A mass flow controller involves both measurement and regulation. The measurement principle varies depending on the sensor used, such as thermal, differential pressure, or Coriolis principles. After measurement, the mass flow controller displays the instantaneous and cumulative flow rates.

Regulation is achieved through control valves. Users can set flow rates as needed. The control valves adjust the flow rate of the medium based on the sensor feedback signal, maintaining it within the set range. Even fluctuations in system temperature or pressure will not affect the flow rate.

A mass air flow sensor can control the instantaneous flow rate of air within its measurement range. This needs to be considered in conjunction with the measurement range and control ratio. For example, if the flow controller you purchased has a measurement range of 10 sccm to 1 SLM and a control ratio of 50:1, then the lower limit of the controller can reach 20 sccm.

The main functions of a flow controller include:

  • Monitoring and regulating flow: Flow controllers monitor, regulate, and control the flow rate of liquids or gases, ensuring a constant flow rate in pipelines to meet the needs of production processes.
  • Saving resources: By controlling the flow rate, raw material consumption can be reduced, achieving savings and cost reduction.
  • Protecting facilities: Flow controllers can slow down the flow velocity of the medium, protecting facilities from damage caused by flow surges exceeding their capacity.
  • Preventing backflow: In some special cases, flow controllers can effectively prevent backflow of the medium, avoiding damage or contamination of facilities.

Flow controllers are widely used in industries such as chemical, petroleum, pharmaceutical, and food to meet the flow rate requirements of different fluids.

Analog Mass Flow Controller/Meter Price

The market price of Analog Mass Flow Controllers/Meters is primarily influenced by their core performance indicators, especially flow control range (scale) and control accuracy. Generally, devices with higher accuracy requirements have correspondingly higher manufacturing costs and technical complexity, resulting in higher market prices.

Users should comprehensively evaluate their accuracy needs based on their actual application scenarios when selecting a model. Not all applications require the highest accuracy MFC; choosing a model that meets process requirements and offers a suitable cost-performance ratio is a more rational approach.

With technological advancements and accumulated application experience, the application of MFCs in various technology-intensive fields such as industrial automation, semiconductor manufacturing, life sciences, and new energy is continuously expanding.

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Sino-Inst is a professional manufacturer and supplier of Analog Mass Flow Controllers/Meters. Our high-precision mass flow controllers offer broad gas compatibility (nearly 100 gases) and a response time of less than 200ms. They exhibit excellent adaptability to mixed gases, meeting the performance requirements of most mixed gas systems.

We also provide compact gas distribution boxes and cabinets with integrated displays and digital control methods such as Modbus. Customization of various parameters and OEM/ODM services are supported. Please feel free to contact our sales engineers!

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