SI-10FD Digital Mass Flow Controller/Meter

Digital Mass Flow Controller-Meter

The SI-10FD Digital Mass Flow Controller/Meter is based on thermal mass flow measurement technology, combined with advanced digital signal processing and control algorithms, and supports RS232/485 and MODBUS protocols.

When used with your company’s mass flow measurement and control system, it can control solenoid valves. Parameters can be adjusted according to different operating conditions to achieve fast and accurate flow control. The user interface is user-friendly and easy to operate. Customized functions can also be provided according to customer needs.

★★★★★

  • Short delivery time
  • Better price
  • Customizable parameters

Features

  • Digital input/output allows flow rate control or display using a flow computer.
  • It can be used to control various clean, dry gases, including corrosive and specialty gases. However, for the use of corrosive and specialty gases, appropriate model selection and sealing materials are required.
  • It provides convenient and accurate monitoring of various gases flowing in pipelines without the need for temperature or pressure compensation.
  • Thermal diffusion technology is a high-performance and reliable technology that performs well under harsh conditions.
  • It is compact, highly digitized, easy to install, and provides accurate measurements.
  • With flow control system software, parameters can be adjusted according to different operating conditions to achieve fast and accurate flow rate control.

Specifications

ModelSI-10FD-LM; SI-10FD-LCSI-10FD-MM; SI-10FD-MCSI-10FD-BM; SI-10FD-BC
Measurement Range2SCCM～30SLM (low range)30SLM～300SLM (medium range)300SLM～3000SLM (high range)
Control RangeRange ratio 100:1; Controller valve control range 50:1
Accuracy±1.0% F.S
Linearity±0.5% F.S
Repeatability±0.2% F.S
Response Time<0.8s
Digital InputsRS232/485, MODBUS protocol
Analog Inputs0–5V, 4–20mA, 1–5V
Power Supply±15VDC, 24VDC
Operating Temperature0–50℃
Operating PressureOperating pressure drop: <0.01 MPa
Maximum Pressure Rating3 MPa/10 MPa
Electrical ConnectionsDB15 connector
Leak Rate1×10⁻⁹ Pa·m³/s
Temperature Coefficient±0.025% F.S./°C
Base MaterialStainless steel
Seal MaterialFluorocarbon rubber, neoprene, nitrile rubber
Connectorsφ3, φ6, 1/8″, 1/4″, φ8, φ10, φ12, flange mounting
  • Dimensional diagrams of SI-10FD-LM Digital Mass Flow Meter
    Dimensional diagrams of SI-10FD-LM Digital Mass Flow Meter
  • SI-10FD-LC Digital Mass Flow Controller Dimension
    SI-10FD-LC Digital Mass Flow Controller Dimension
  • SI-10FD-MM Digital Mass Flow Meter Dimension
    SI-10FD-MM Digital Mass Flow Meter Dimension
  • SI-10FD-MC Digital Mass Flow Controller Dimension
    SI-10FD-MC Digital Mass Flow Controller Dimension
  • SI-10FD-BM Digital Mass Flow Meter Dimension
    SI-10FD-BM Digital Mass Flow Meter Dimension
  • SI-10FD-BC Digital Mass Flow Controller Dimension Drawing
    SI-10FD-BC Digital Mass Flow Controller Dimension Drawing

Digital Mass Flow Controller/Meter Working Principle

The Digital Mass Flow Controller/Meter operates based on thermal mass flow measurement technology, combined with advanced digital signal processing and control algorithms. Through a built-in heating element and temperature sensor, it accurately measures the heat carried away by the fluid, thereby calculating the fluid’s mass flow rate.

When the fluid flows through the sensor, it changes the sensor’s temperature distribution, and this temperature change has a definite functional relationship with the fluid’s mass flow rate.

The microprocessor in MFC performs rapid calculations based on the measured temperature signal, converting the flow data into a digital signal and comparing it with a preset flow value. Once a deviation between the actual flow rate and the target flow rate is detected, the controller immediately adjusts the valve opening. By changing the cross-sectional area of ​​the fluid flow, it precisely controls the flow rate, quickly stabilizing it at the set value. The entire process is responsive and highly accurate, with errors controlled within a very small range, meeting the stringent flow control requirements of various applications.

Applications of the Digital Mass Flow Controller/Meter

The SI-10FD Digital Mass Flow Controller/Meter measures the mass flow rate of gases using the principle of capillary heat transfer temperature difference calorimetry, unaffected by changes in ambient temperature and pressure.

Application Areas:

  1. Semiconductor Manufacturing: Precisely controlling the flow rate of process gases during etching, deposition, and doping processes.
  2. Chemical Vapor Deposition (CVD): Used in the manufacture of optical fibers, solar cells, and other high-tech products.
  3. Food Processing: Controlling the gas mixing ratio in food packaging, such as adjusting the gas composition in air-conditioning packaging.
  4. Bioreactors: Precisely controlling the flow rate of oxygen and nutrient gases input to bioreactors.
  5. Environmental Monitoring: Using DMFC to ensure accurate measurements in air quality monitoring and emission control.

Also applicable to the glass industry, solar energy, atmospheric monitoring, industrial manufacturing, oil and petrochemicals, coal, metallurgical gas distribution, environmental protection, and various instrumental analyses.

Applications of the Digital Mass Flow Controller-Meter

User Case:

A certain heat treatment equipment company specializes in the research and production of equipment for ion nitriding processes. Its main products include the LD series ion nitriding furnaces, the LDMC series pulse ion nitriding furnaces, and ion nitriding furnaces with auxiliary heating.

Their gas supply system consists of an ammonia cylinder, an ammonia pressure regulator, a gas mass flow meter, and gas pipelines. Two flow meters are required, one for regulating the ammonia flow and the other for regulating the carburizing gas flow. The two gases are mixed after passing through the flow meters before entering the furnace. By adjusting the flow ratio, a carbonitriding process (soft nitriding) can be achieved.

Solution: Based on the process requirements of this product, our company customized the SI-10FD series gas mass flow meter for this enterprise. After successful installation on the equipment, it is unaffected by temperature, pressure, or other conditions, accurately controlling the flow rates of both gases with high sensitivity and fast response. It achieves the proportional mixing of the two gases, thereby improving the carbonitriding process, earning high praise from the customer and establishing a long-term cooperative relationship.

Multi-MFC Integrated Monitoring and Control

Multi-MFC Integrated Monitoring and Control

In practical applications, users often need to remotely monitor and control multiple gas flow rates.

We can implement remote monitoring and control of 40 SI-10FD gas mass flow controllers via DB9 multi-point hubs.

One hub can power 10 MFCs. After connecting four hubs in series to a computer or PLC using communication cables, all 40 MFCs can be configured and read in the software. Wiring is simple and quick. The software can be customized according to customer needs, including adding variation curves and coefficient corrections. The interface is user-friendly and easy to operate.

Technical Support

Mass flow meters/flow controllers are directly connected radially to the pipeline. For applications with smaller pipe diameters, common connections include: compression fittings, pagoda fittings, latex hose connections, quick-connect fittings, quick-tightening fittings, and VCR connections. For larger diameter pipes, flange connections are the primary method.

Gas flow controllers require accumulated gas volume values ​​in some applications. How can the accumulated gas volume be precisely controlled?

Our MFC function includes a feature that automatically sets the instantaneous flow rate to 0 once the accumulated flow rate value is reached.

First, set the desired accumulated flow rate (accumulated gas volume) within the meter. Then, set the real-time intake flow rate (instantaneous flow rate). MFC will activate the accumulation function, and automatically stop gas supply once the accumulated flow rate reaches the set target value.

This control method can be operated on the meter’s screen or controlled via a host computer, and is equipped with 485 Modbus communication.

Mass flow meters (MFMs), especially mass flow controllers (MFCs), involve pressure issues during use, generally including the following:

  • Pressure withstand: This is the product’s safe pressure, which can be understood as burst pressure.
  • Maximum operating pressure: This is the maximum pressure that the inlet end of the flow meter/flow controller can withstand during operation.
  • Operating pressure difference: This refers to the pressure difference between the inlet and outlet. This operating pressure difference mainly relates to the flow controller (MFC) because the MFC has a flow control valve. This pressure difference refers to the difference between the inlet pressure at the flow controller’s inlet and the resistance or back pressure at its outlet.
  • Pressure Considerations in Mass Flow Meters (MFMs): As the name suggests, a mass flow meter (MFM) measures flow rate without controlling it. Because it has few control components (mainly control valves), pressure loss is minimal. During selection discussions, only the maximum operating pressure or withstand pressure at the air inlet is usually required.
  • Pressure Loss (Pressure Drop, Differential Pressure) in Mass Flow Controllers (MFCs): Pressure loss refers to the pressure loss caused by friction as fluid flows through pipes or equipment. For flow controllers installed in gas circuits, each component experiences varying degrees of pressure loss. Therefore, to ensure normal operation, the pressure requirements of each component must be met, and the pressure loss of each component must be considered to determine the pressure at the pipe inlet.

If the pipeline design does not consider flow capacity, pipeline malfunctions may be reflected in the MFC, resulting in uncontrollable flow, flow rates failing to reach set values, or uncontrollable flow outside a certain range.

Therefore, when selecting a Mass Flow Controller (MFC), it is necessary to inform the inlet and outlet pressures (or the environmental conditions at the outlet) of the flow controller. This is especially important for special applications with very low or high requirements for pressure loss (pressure drop, differential pressure). We can perform pre-shipment testing based on the actual operating conditions to ensure the MFC exhibits excellent performance during use.

Currently, our company’s mass flow meters/flow controllers have a standard pressure rating of up to 3 MPa; high-pressure products range from 10 MPa to 20 MPa, 40 MPa, and 60 MPa. Higher pressures for liquid media are possible, but pressures exceeding 3 MPa require separate consultation and customization.

Quantitative Control of Gas Flow

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Sino-Inst has developed a flow controller (touchscreen) with an existing display control panel, incorporating advanced industry technology. It allows users to directly set flow rates, read accumulated flow rates, and set quantitative gas supply directly on the Digital Mass Flow Controller/Meter unit. It also enables remote control via connection to peripherals such as computers, touchscreens, and secondary meters.

The gas path connection can be equipped with quick-connect or quick-screw couplings for easy modification, relocation, or portability. When an external DC power supply is inconvenient, an external battery can be used (please specify when ordering) or 220V AC mains power (please specify when ordering).

If you require customized gas flow measurement and control solutions, please feel free to contact our sales engineers!

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SI-10FD Digital Mass Flow Controller/Meter |RS232/485-MODBUS

The SI-10FD Digital Mass Flow Controller/Meter is based on thermal mass flow measurement technology, combined with advanced digital signal processing and control algorithms, and supports RS232/485 and MODBUS protocols.

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