
The SI-20FD-L high pressure mass flow controller consists of a mass flow sensor, laminar flow separation components, a flow controller regulating valve, and an amplification control circuit. It can withstand pressures up to 40 MPa. It uses digital signal input and output and features short preheating time, low zero drift, and high reliability.
Suitable for high-pressure environments; the equipment needs to withstand a pressure of 40 MPa. Suitable for high-pressure hydrogen refueling units in the hydrogen energy industry.
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High Pressure Mass Flow Controller/Flow Meter Features
Specifications
| Series | ACU20FD-L | |||
| Range | 0-(2,5,10…1000)SCCM, 0-(1,5,10…30)SLM | 0-(30,40,50…300)SLM | ||
| Accuracy | ±0.5%F.S | |||
| Linearity | ±0.5%F.S | |||
| Repeatability | ±0.2%F.S | |||
| Response Time | <0.2s | <0.1s | <0.2s | <0.1s |
| Operating Differential Pressure | 0.1~0.5MPa (specify when ordering) | |||
| Turndown Ratio | 50:1 | 100:1 | 50:1 | 100:1 |
| Analog Output | 0~5V、4~20mA | |||
| Digital Output | RS232/485, MODBUS protocol | |||
| Power Supply | 24VDC | |||
| Communication Protocol | Modbus、DeviceNet、profinet、ErtherCAT、profibus | |||
| Operating Temperature | 0~50℃ | |||
| Maximum Pressure Rating | 40MPa/70MPa (specify when ordering) | |||
| Electrical Connection | DB9 port | |||
| Display | Touchscreen display | |||
| Leak Rate | 1×10⁻9Pa m³/S | |||
| Protection Rating | IP40 | |||
| Valve | Valve always closed | / | Valve always closed | / |
| Base Material | Stainless steel; | |||
| Seal Material | Fluororubber, nitrile rubber, EPDM, perfluoroelastomer; | |||
| Body Thread | G3/8 internal thread; | |||
| Connection | Foldings, pagoda fittings, quick-connect fittings, VCRs, flanges, etc.; | |||

Argon Blowing Monitoring System for Steel Furnaces
In steel production, mass flow controllers/meters play a crucial role, ensuring that the required gas enters the furnace at the correct proportions and flow rates under high pressure.
A steel company was seeking a suitable gas mass flow solution for its post-furnace argon blowing monitoring system. Based on its operating conditions, the steel company specified the following requirements:
- Due to the harsh environment of steel production, a high protection rating is required;
- Due to the high-pressure environment inside the furnace, the gas mass flow meter must be able to withstand high pressure differentials;
- The monitored media are argon and nitrogen;
- Continuous and stable monitoring is required during operation.
Furthermore, the steel company provided specific operating data, including flow range, accuracy, and pressure.
Sino-Inst, combining the operating data and specific requirements, customized a high-precision mass flow controller/meter, SI-20FD-L, for the client.
The parameters of this customized mass flow controller/meter are as follows:
- With pilot valve, pressure range: 0.3MPa~3MPa;
- Protection rating upgraded to IP65;
- Utilizes a large-range flow meter, range: 300SLM~3000SLM;
- Accuracy: 0.5±%F.S;
- Response time: 0.2s;
- Power supply voltage: 24V
This solution brings the following benefits to the customer:

- Achieves brand replacement, facilitating cost reduction and efficiency improvement. Facing the continued pressure in the steel market, this steel company uses Sino-Inst’s stable products, ensuring stable production of high-quality steel products and facilitating cost reduction and efficiency improvement.
- Ensures normal operation and continuous production of high-quality steel products. After using the Sino-Inst high-precision mass flow controller/meter, the steel company has achieved continuous and stable production of high-quality steel products. Sino-Inst’s gas flow control solution effectively ensures production efficiency and product quality.
This case study provides valuable insights for more steel companies and accumulates valuable experience for Sino-Inst in serving steel enterprises.
High-Pressure Hydrogen Flow Control
The SI-20FD-L High Pressure Mass Flow Controller/Flow Meter is suitable for measuring pure gases, especially hydrogen. It can be used to measure the hydrogen flow rate in hydrogen refueling machines with pressures of 35MPa and 70MPa.
Hydrogen is an elemental gas formed from hydrogen. At room temperature and pressure, the density of hydrogen is 0.089 g/L (101.325 kPa, 0°C), only 1/14 that of air, making it the least dense gas known in the world. With increasing emphasis on clean energy, the application of hydrogen is becoming more and more widespread, and in practical applications, it is often necessary to measure or control the amount of hydrogen.
The SI-20FD-L High Pressure Mass Flow Controller/Flow Meter is well-suited for the characteristics of hydrogen due to its high accuracy and ability to implement electrical automation control. It has been widely used for the measurement and control of hydrogen flow, and has high airtightness, which can effectively avoid the risk of hydrogen leakage. In some special applications, an explosion-proof enclosure can also be added to meet design requirements.
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Many industrial, semiconductor, chemical, and laboratory fields have stringent requirements for gas measurement and control under special operating conditions. For example, in semiconductor etching and deposition processes, precise gas control is essential to ensure the thickness and etching depth of the thin film. High demands are also placed on the repeatability, response speed, stability, and scalability of the measurement and control instruments.
Sino-Inst developed the SI-20FD-L high pressure mass flow controller/flowmeter to meet these stringent operating requirements. With its superior accuracy and performance, it has become one of the most frequently purchased products by customers and is widely used in various industries and measurement and control fields.
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Related Products
SI-20FD-L High Pressure Mass Flow Controller/Meter 40MPa
The SI-20FD-L high pressure mass flow controller consists of a mass flow sensor, laminar flow separation components, a flow controller regulating valve, and an amplification control circuit. It can withstand pressures up to 40 MPa. It uses digital signal input and output and features short preheating time, low zero drift, and high reliability.
Product SKU: SI-20FD-L High Pressure Mass Flow Controller/Flow Meter
Product Brand: Sino-Inst
Product In-Stock: PreOrder
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