The SI-20FC series is a high-accuracy DP Mass Flow Controller/flow meter. It is widely used in various industries, such as process manufacturing, food analysis, analytical testing and measurement, etc. It can simultaneously display and output instantaneous flow rate, cumulative flow rate, pressure, temperature, etc. With a 50:1 adjustable range ratio, a single SI-20FC differential pressure mass flow controller can replace the function of multiple devices.
Accuracy of 0.5%, repeatability of 0.2%, and a control response time of less than 200 milliseconds ensure normal operation of process gases. When control functions are required, an electromagnetic proportional control valve and built-in PID control function can be added.
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Features
Specifications
| Technical Specifications | High-Accuracy Mass Flow Controller | High-Accuracy Mass Flow Meter |
| Range | 2SCCM~3000SLM | |
| Measurement and control range ratio | Controller valve range 50:1 | Flow rate range ratio 100:1 |
| Accuracy | ±0.5%F.S (full scale) | |
| Linearity | ±0.25%F.S | |
| Repeatability | ±0.2%F.S | |
| Stability | <±0.1%FS | |
| Response Time | <0.2s | <0.1s |
| Temperature Coefficient | ±0.025%F.S/℃ | |
| Operating Temperature | 10~50℃ | |
| Operating Pressure | Operating pressure difference: 0.1~0.5Mpa Operating pressure drop <0.01Mpa | |
| Maximum Pressure Rating | 1MPa | |
| Leak Rate | 1 X 10-9 Pa m3/S | |
| Base Material | Stainless steel | |
| Connectors | φ8, φ10, φ12, flange mounting | |
| Seal Material | Fluororubber, neoprene rubber, nitrile rubber | |
| Enclosure Protection Rating | IP40 | |
| Mounting Position | Horizontal mounting | |
| Monochrome LED Display | Simultaneous display of flow rate and settings | |
| Electrical Connections | DB9 port, RJ11, 5.5×2.1 power quick connector | |
| Display Status | With LCD display, without LCD display | |
| Digital Output | RS232/485, MODBUS protocol | |
| Analog Output | 0~5V, 4-20mA, 1-5V | |
| Power Supply | ±15VDC,24VDC | |

SI-20FC High-Accuracy DP Mass Flow Meter Low Range

SI-20FC High-Accuracy DP Mass Flow Controller Low Range

SI-20FC High-Accuracy DP Mass Flow Meter Medium Range

SI-20FC High-Accuracy DP Mass Flow Controller Medium Range

SI-20FC High-Accuracy DP Mass Flow Meter High Range

SI-20FC High-Accuracy DP Mass Flow Controller High Range
Performance and Principle
The SI-20FC series is a high-precision differential pressure flow controller/flowmeter. This series utilizes a differential pressure mass flow measurement principle with no thermal drift and no response hysteresis, and can simultaneously display and output instantaneous flow rate, cumulative flow rate, pressure, and temperature.
For applications requiring control functions, an electromagnetic proportional control valve and built-in PID control can be added.
Unlike thermal mass flow meters, the SI-20FC series mass flow meters do not have an additional “specific heat capacity” error when using gas conversion coefficients. Therefore, even if the measured gas differs from the factory calibration gas, it will not affect the measurement accuracy.
Compared to traditional differential pressure flow controllers, the SI-20FC series features a more sensitive sensor and a large touchscreen display, resulting in significant improvements in both accuracy and ease of operation.
Applications in Laboratory and Industrial Environments
The SI-20FC series high-precision differential pressure flowmeter/controller achieves a measurement accuracy of ±0.5%, sufficient to meet the needs of most customers. It can be used in various laboratory experiments as well as in complex industrial environments.
To adapt to complex industrial environments, some of our models also support IP67 dust and water resistance and IICT4 intrinsically safe explosion protection. In addition to standard analog input/output interfaces, they also support 485/232 interfaces, and the communication protocol is the standard Modbus RTU protocol.
Calibration test

Technical Support
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Sino-Inst specializes in manufacturing gas/liquid mass flow meters and controllers, designing them according to customers’ actual operating conditions and needs. The SI-20FC High-Accuracy DP Mass Flow Controller/Flow Meter is a high-performance device designed for precise gas flow control. Utilizing advanced differential pressure flow control technology, it achieves gas flow control through precise differential pressure measurement, ensuring high-precision flow regulation even in complex and dynamic environments.
The Sino-Inst SI-20FC High-Accuracy DP Mass Flow Controller/Flow Meter supports multiple gas types, including nitrogen, oxygen, argon, and air, meeting diverse application requirements. Suitable for high-precision flow control needs in semiconductors, chemical engineering, laboratory research, and other fields, its superior performance has led to its widespread application across various industries and sectors.
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More Mass Flow Controllers/Meters
SI-20FC High-Accuracy DP Mass Flow Controller/Flow Meter
The SI-20FC series is a high-accuracy DP Mass Flow Controller/flow meter. It is widely used in various industries, such as process manufacturing, food analysis, analytical testing and measurement, etc. It can simultaneously display and output instantaneous flow rate, cumulative flow rate, pressure, temperature, etc. With a 50:1 adjustable range ratio, a single SI-20FC differential pressure mass flow controller can replace the function of multiple devices.
Product SKU: SI-20FC High-Accuracy DP Mass Flow Controller/Flow Meter
Product Brand: Sino-Inst
Price Valid Until: 2099-09-09
Product In-Stock: InStock
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