SI-20FDH High Temperature Thermal Mass Flow Controller/Meter

SI-20FDH High Temperature Thermal Mass Flow Controller

The SI-20FDH high-temperature thermal mass flow controller utilizes a thermal principle and can measure temperatures up to 150℃. Using a customized high-speed proportional control valve, it can quickly and accurately measure the volumetric flow rate/mass flow rate of high-temperature gases/steam with an accuracy of 0.5%.

★★★★★

  • Short delivery time
  • Better price
  • Customizable parameters

Features

  • Measures media temperatures up to 150°C;
  • Accuracy up to ±0.5% FS;
  • Enables rapid, precise measurement of high-temperature gas/steam volume flow/mass flow;
  • Precise control of medium volume flow/mass flow via custom high-speed proportional control valves;
  • Extra-large touchscreen display for user-friendly operation, with open analog I/O and RS-485 digital communication;
  • No internal moving parts or thermal elements; vibration-tested and installation-direction-insensitive;
  • Internal compensated laminar flow differential pressure technology maintains laminar flow even across wide flow ranges.

Specifications

SeriesSI-20FDH
ModelLCLMMCMMBCBM
Measuring RangeGas: 0-（2,5,10…1000）SCCM， 0-（1，5，10…30）SLMGas: 0-（30,40,50…300)SLMGas: 0-（300,400,500…3000)SLM
Steam: 0-（2,5,10…1000）SCCM， 0-（1,2,3…10）SLMSteam: 0-（10,20,30…100)SLMSteam: 0-（100,150，200…500)SLM
Accuracy1%F·S
Repeatability±0.2%F·S
Zero Drift & Full-Scale Drift0.02% F.S/ ºC/Atm
Operating Differential Pressure0.1~0.5MPa (specify when ordering)
Turndown Ratio50:1100:150:1100:150:1100:1
Typical Response Time200 milliseconds (adjustable)
Analog Output0～5V、4～20mA
Digital OutputRS232/485, MODBUS protocol
Power Supply24VDC
Maximum Working Pressure1MPa
Electrical ConnectionDB15 hole
Protection RatingIP40
Leak Rate1×10-9Pa m³/S
ValveValve normally closed/Valve normally closed/Valve normally closed/
Base MaterialStainless steel
Seal MaterialFluororubber, nitrile rubber, EPDM, perfluoroelastomer
Body ThreadG3/8 internal threadG1/2 internal thread
ConnectionFoldings, ferrules, quick-connect fittings, VCRs, flanges, etc.
  • SI-20FDH-MC High Temperature Thermal Mass Flow Controller Dimension Diagram
  • Dimensions of the High Temperature Base for a Thermal Mass Flow Controller
  • Base for High Temperature Thermal Mass Flow Controller

Thermal Mass Flow Controller/Meter Working Principle

The working principle of a thermal mass flow meter/controller is based on the law of thermal conductivity. It determines the fluid flow rate by heating a sensor through an electric current and measuring the change in sensor temperature. When gas passes through the sensor, the sensor’s temperature changes, and its resistance changes accordingly. By measuring the change in resistance, the gas flow rate can be determined.

Thermal Mass Flow Controller-Meter Working Principle

Advantages of a Thermal Mass Flow Controller/Meter:

  1. High Accuracy: Thermal mass flow meters and controllers offer high-precision measurement capabilities, accurately measuring the flow rate of various gases and providing reliable data support.
  2. Wide Measurement Range: It can measure and control over a wide flow range, suitable for different fields and needs.
  3. Fast Response: Thermal mass flow meters and controllers have a fast response speed, allowing for real-time monitoring and control of changes in gas flow rate.
  4. Strong Corrosion Resistance: It is typically made of corrosion-resistant materials capable of withstanding various harsh environments and gas compositions.
  5. Low Pressure Loss: Thermal mass flow meters and controllers have low pressure loss, causing no significant pressure impact on the fluid system.

Technical Support

A mass flow controller has the following functions:

Automatic Flow Control: Users can set the flow rate as needed, and the MFC will automatically maintain the flow rate at the set value, even if system pressure or ambient temperature changes.

Measurement and Control: It can control not only instantaneous flow rate but also provide cumulative flow rate measurement.

Flow Stabilizer: The mass flow controller can be manually set or connected to a computer for automatic control, acting as a flow stabilizer.

These functions make the mass flow controller very important in many industrial applications.

MFM (Mass Flow Meter) and MFC (Mass Flow Controller) are two devices used for measuring and controlling gas flow, but their functions and applications differ.

The function of an MFM is to monitor and measure the flow rate, primarily for flow metering or monitoring. It provides accurate flow data but cannot control the flow.

An MFC not only measures flow but also precisely controls it. Users can set a target flow value, and the MFC will automatically adjust and maintain the flow at the set value, even if system pressure or ambient temperature changes.

In practical applications, if only flow measurement is required, an MFM is typically chosen; while when flow control is needed, an MFC is used. For example, when measuring capillary flow capacity, constant pressure flow measurement can use an MFM, while constant flow pressure measurement requires an MFC. Furthermore, an MFC can also be used as an MFM in a purging state, but this will result in a significant pressure drop.

Mass flow controllers are indispensable core components in semiconductor manufacturing. Their high precision, high stability, and fast response capabilities provide crucial assurance for core chip production processes.

In chemical vapor deposition (CVD) and atomic layer deposition (ALD), MFCs precisely control the flow rate and mixing ratio of reactive gases (such as silane and oxygen) to ensure film thickness uniformity and composition consistency.

MFCs control the flow rate of reactive gases (such as fluorides and chlorine) in real time to ensure etching rate and pattern accuracy. For example, in gate etching, flow deviations can lead to transistor performance degradation; MFCs ensure process stability with an accuracy of ±0.5%.

In the wafer cleaning process, MFCs precisely control nitrogen flow rate to achieve residue-free drying; simultaneously, they monitor gas leaks and impurities to ensure the cleanliness of the cleanroom environment.

Sino-Inst’s high-precision mass flow controllers achieve an accuracy within ±0.5% FS (FS is full scale). They are commonly used in semiconductor manufacturing, microelectronics, and other fields with extremely high requirements for gas flow control accuracy to ensure process consistency and product quality stability.

General-precision mass flow controllers typically have an accuracy between ±1% FS and ±2% FS. They are suitable for laboratory instruments, analytical instruments, and other fields, meeting the flow control accuracy requirements of most routine experiments and analyses, providing reliable flow control for experiments and analyses.

In terms of measurement principle, Coriolis mass flowmeters generally offer the best measurement accuracy, reaching 0.1%. However, the accuracy of a flowmeter is often related to the manufacturing process, the application environment, and the characteristics of the fluid being measured.

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SI-20FDH High Temperature Thermal Mass Flow Controller/Meter is widely used in various industries, such as process manufacturing, food analysis, analytical testing, and metrology.

Multivariable measurement and a 50:1 adjustable range ratio allow a single SI-20FDH High Temperature Thermal Mass Flow Controller/Meter to replace the functionality of multiple devices. An accuracy of 0.5%, repeatability of 0.2%, and a control response time of less than 200 milliseconds ensure the normal operation of process gases/steams.

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SI-20FDH High Temperature Thermal Mass Flow Controller

The SI-20FDH high-temperature thermal mass flow controller utilizes a thermal principle and can measure temperatures up to 150℃. Using a customized high-speed proportional control valve, it can quickly and accurately measure the volumetric flow rate/mass flow rate of high-temperature gases/steam with an accuracy of 0.5%.

Product SKU: SI-20FDH High Temperature Thermal Mass Flow Controller/Meter

Product Brand: Sino-Inst

Product In-Stock: InStock

Editor's Rating:
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