SI-10HT High Temperature Mass Flow Controller/Meter

The SI-10HT High Temperature Mass Flow Meter enables rapid and accurate measurement of the volumetric flow rate and mass flow rate of process gases, liquids, and vapors. The SI-10HT High Temperature Mass Flow Controller utilizes a custom-designed high-speed proportional control valve for precise control of the volumetric and mass flow rates of gases, liquids, and vapors.

The SI-10HT High Temperature Mass Flow Controller & Meter features an integrated multi-functional digital display, allowing users to control setpoints and PID valve adjustments via on-screen buttons. It also supports analog input/output and RS-485 digital communication. When measuring liquids, a unique vent allows for easy air removal.

★★★★★

  • Short delivery time
  • Better price
  • Customizable parameters

Features

  • Measurable temperature range: 80~200°C; Customized upgraded version can measure 350℃
  • Enables rapid and precise measurement of volumetric flow/mass flow for process gases/liquids/vapors;
  • Employs custom high-speed proportional control valves for precise regulation of medium volume/mass flow;
  • Features a unique vent hole for effortless air purging during liquid measurement;
  • Contains no internal moving parts or thermal elements; passes vibration testing;
  • Insensitive to installation orientation;
  • Utilizes internally compensated laminar flow differential pressure technology, maintaining laminar fluid flow across a wide flow range.

Specifications

SeriesSI-10HT
ModelLCLMMCMMBCBM
Measuring RangeGas：0-（2,5,10…1000）SCCM， 0-（1，5，10…30）SLMGas：0-（30,40,50…300)SLMGas：0-（300,400,500…3000)SLM
Liquid：0-（2,5,10…500）SCCMLiquid：0-（500,600…1000）SCCM， 0-（1,2,3…10）SLMLiquid：0-（1，2，10…20）SLM
Steam：0-（2,5,10…1000）SCCM， 0-（1,2,3…10）SLMSteam：0-（10,20,30…100)SLMSteam：0-（100,150，200…500)SLM
Accuracy±1.0%F.S
Repeatability±1%F.S
Zero Drift & Full-Scale Drift0.02% F.S/ ºC/Atm
Operating Differential Pressure0.1~0.5MPa (specify when ordering)
Turndown Ratio50：1100：150：1100：150：1100：1
Typical Response Time200 milliseconds (adjustable)
Analog Output0～5V、4～20mA
Digital OutputRS232/485, MODBUS protocol
Power Supply24VDC
Measurable temperature80~200℃; Customized upgraded version can measure 350℃
Operating Temperature+10~+50℃
Operating Voltage Drop<0.01Mpa
Operating Pressure＜1MPa
Electrical ConnectionDB15 hole
Protection RatingIP40
Leak Rate1×10-9Pa m³/S
ValveValve normally closed/Valve normally closed/Valve normally closed/
Base MaterialStainless steel
Seal MaterialFluororubber, nitrile rubber, EPDM, perfluoroelastomer
Body ThreadG3/8 internal threadG1/2 internal thread
ConnectionFoldings, ferrules, quick-connect fittings, VCRs, flanges, etc.
  • SI-10HT-LM High Temperature Mass Flow Controller-Meter Dimension
  • SI-10HT-LM High Temperature Mass Flow Controller-Meter Split Dimension
  • SI-10HT-LC High Temperature Mass Flow Controller-Meter Dimension
  • SI-10HT-LC High Temperature Mass Flow Controller-Meter Split Dimension
  • SI-10HT-MM High Temperature Mass Flow Controller-Meter Dimension
  • SI-10HT-MM High Temperature Mass Flow Controller-Meter Split Dimension
  • SI-10HT-MC High Temperature Mass Flow Controller-Meter Dimension
    SI-10HT-MC High Temperature Mass Flow Controller-Meter Dimension
  • SI-10HT-MC High Temperature Mass Flow Controller-Meter Split Dimension
  • SI-10HT-BC High Temperature Mass Flow Controller-Meter Split Dimension

Calibration Data

SI-10HT High Temperature Mass Flow Controller-Meter Calibration data

Steam Flow Measurement and Control

In modern industrial processes, accurate steam flow measurement is crucial for process control, energy efficiency management, and safe production. Steam flow meters are widely used in various industries, including energy, chemical, pharmaceutical, and food processing. However, steam flow measurement faces a series of complex technical challenges, especially in terms of performance under different pressure and temperature conditions.

High Temperature Steam Flow Controller

For example, in low-pressure environments, the boiling point of water decreases significantly, making steam more prone to phase change and leading to measurement errors. Conversely, under normal or high-pressure conditions, high-temperature steam may exceed the temperature limits of traditional flow sensors, causing equipment damage or measurement distortion.

To address these challenges, the Sino-Inst laminar flow differential pressure mass flow controller offers an innovative solution. This technology is based on the principle of laminar flow differential pressure, directly calculating mass flow rate by accurately measuring the pressure difference change of the fluid in laminar flow conditions, without relying on complex temperature or pressure compensation. This method not only avoids the limitations of traditional steam flow meters under operating conditions but also significantly improves the accuracy and reliability of the measurement.

In the semiconductor manufacturing industry, steam flow control has high requirements for process precision. Sino-Inst laminar differential pressure mass flow controllers can stably handle high-purity steam and specialty gases, effectively avoiding phase transition problems caused by boiling point reduction even under low-pressure conditions. Its sensors utilize high-temperature resistant materials and innovative design, ensuring long-term stability in high-temperature environments, thus meeting the stringent requirements of continuity and repeatability in semiconductor production lines.

The biopharmaceutical industry is another typical application scenario. Steam is widely used in sterilization and process heating, but traditional flow meters often have shortened lifespans due to high temperatures and pressures, or measurement deviations due to boiling point changes under low-pressure conditions. Sino-Inst laminar differential pressure technology, through its unique temperature-resistant design and anti-phase-change capabilities, achieves precise control of steam quality, ensuring the aseptic requirements and compliance of pharmaceutical processes.

The food and beverage industry also benefits from this technology. During distillation, sterilization, and filling processes, steam flow needs to be precisely controlled to maintain product quality. Sino-Inst flow controllers can adapt to varying pressure environments, ensuring the accuracy of flow data even when a sudden drop in system pressure causes a decrease in the boiling point of water. Meanwhile, its high-temperature resistance avoids the risk of sensor failure under high-pressure steam, reducing equipment maintenance costs and production interruptions.

High Temperature Mass Flow Controller-Meter

In new energy fields such as solar thermal and nuclear power systems, steam is often used for energy conversion and transmission. These systems often involve high-temperature and high-pressure conditions, making it difficult for traditional flow meters to operate stably for extended periods. The Sino-Inst laminar flow differential pressure mass flow controller, with its robust design, maintains high performance in high-temperature environments while accurately addressing the challenges posed by pressure fluctuations, providing strong support for efficiency and safety in the energy industry.

The core advantages of the Sino-Inst laminar flow differential pressure mass flow controller lie in its direct mass flow measurement capability, eliminating intermediate conversion errors; its sensor structure is simple and reliable, suitable for various fluid media; and, more importantly, it effectively suppresses phase change effects under low-pressure conditions and exhibits excellent temperature resistance under high-temperature environments. These characteristics make it an ideal choice for steam flow measurement in numerous industrial scenarios.

Technical Support

Volume Flow Rate: Also called operating flow rate, it is the volume of fluid flowing through the cross-section of a pipe under real-time temperature and pressure conditions per unit time. Representative units for small flow rates are generally ml/min and L/min.

Standard Flow Rate: The volumetric flow rate obtained after temperature and pressure compensation. Standard conditions are generally defined as (1) Pressure: 1 atmosphere (101.325 kPa) (2) Temperature: 0℃/15℃/20℃/25℃, specific temperature definitions can be selected. Sino-Inst flow controllers default to (25℃, 101.325 kPa), and the units are generally SCCM and SLPM.

Mass Flow Rate: The mass of fluid flowing through the cross-section of a pipe per unit time. Sino-Inst mass flow controllers measure the standard flow rate. To calculate the actual mass of the gas, the density can be multiplied by the standard flow rate.

Instantaneous Flow Rate: The amount of fluid flowing through a certain cross-section in a very short time is called the instantaneous flow rate. Cumulative Flow Rate: The cumulative instantaneous flow rate of gas through a specific cross-section over a certain period of time.

Set Flow Rate: A term specific to mass flow controllers (MFCs). MFCs stabilize the fluid flow rate at a fixed value by controlling the opening of a proportional control valve. The set flow rate is generally the standard flow rate.

When discussing gases, two key factors influencing their volume are pressure and temperature. For a given amount of gas, the volume changes when pressure and temperature change. The gas environment defined by pressure and temperature is called the operating condition, and the gas flow rate measured under these conditions is called the operating flow rate.

However, customers often need to know the mass flow rate of the gas. But operating conditions are constantly changing, making accurate calculation of mass flow rate difficult.

To solve this problem, we need a standard under which gas calculations are performed. This standard is: pressure at one standard atmosphere (101.325 kPa), and temperature, which varies depending on the industry and company. The Sino-Inst standard temperature is 25°C. This standard condition is called the standard condition, and the gas flow rate measured under these conditions is called the standard flow rate.

What are the advantages of standard flow rate compared to operating flow rate?

Because the pressure and temperature are fixed, the gas density and other physical properties are also determined. Therefore, knowing the gas volume allows for accurate calculation of the gas mass. Consequently, standard flow rate is commonly referred to as mass flow rate in the industry, while operating flow rate is called volumetric flow rate.

Why display operating flow rate?

Since users are concerned with standard flow rate, why does the flow meter also display operating flow rate?

Operating flow rate is not meaningless. In some special applications, users precisely need operating flow rate. For example, in atmospheric sampling in the environmental protection industry, the volume of air in the environment is required. In this case, the operating flow rate measurement function of the Sino-Inst flow meter becomes very important.

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The SI-10HT series is a mass flow controller/meter specially developed by our company for high-temperature media. The basic model can measure up to 200℃, while the upgraded model can measure up to 350℃. It adopts a split-type structure, with a maximum range of 1200 slm, capable of measuring superheated steam up to 380℃. Its high accuracy, fast response, multi-variable measurement, and 50:1 adjustable range ratio are highly favored by users.

If you need high-temperature media flow measurement and control, please contact our sales engineers for parameter customization!

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SI-10HT High Temperature Mass Flow Controller/Meter 200℃/350℃

The SI-10HT High Temperature Mass Flow Meter enables rapid and accurate measurement of the volumetric flow rate and mass flow rate of process gases, liquids, and vapors. The SI-10HT High Temperature Mass Flow Controller utilizes a custom-designed high-speed proportional control valve for precise control of the volumetric and mass flow rates of gases, liquids, and vapors.

Product SKU: SI-10HT High Temperature Mass Flow Controller/Meter

Product Brand: Sino-Inst

Price Valid Until: 2099-09-09

Product In-Stock: InStock

Editor's Rating:
5