SI-10FC Gas Mass Flow Controller with Laminar Differential Pressure (DP) Technology

The SI-10FC laminar differential pressure mass flow controller is designed based on the law of conservation of mass, Bernoulli’s equation, and Hagen-Poiseuille’s law. It calculates the mass flow rate of a fluid by measuring the pressure difference across the pipe. It features no thermal drift and no response hysteresis, and can simultaneously display and output instantaneous flow rate, cumulative flow rate, pressure, and temperature. For additional control functions, an electromagnetic proportional control valve and built-in PID control can be added.

★★★★★

  • Short delivery time
  • Better price
  • Customizable parameters

Features

  • No thermal drift, negligible temperature drift and time drift, long-term stability of 0.1% F.S./year;
  • Accuracy of 1.0%, range adjustable via keypad within 100:1 without calibration;
  • Simultaneous display of instantaneous and cumulative flow, pressure, and temperature;
  • No warm-up required, zero response lag during measurement;
  • Built-in conversion coefficients for 30 gases, eliminating additional errors from specific heat capacity and maintaining accuracy.

Specifications

Technical ParametersFlow MeterFlow controller
Measuring RangeLow Range: 100SCCM~30SLM
Medium Range: 30SLM~300SLM
Large Range: 500SLM~3000SLM
Accuracy (under standard conditions after zeroing)±1% F.S
Repeatability±1% F.S
Zero drift & full-scale drift0.02% F.S/ °C/Atm
Operating range/range adjustability2% ~ 100% F.S / 50:1
Maximum measurable flow rate100% F.S (controllable)
Typical response time200ms (adjustable)
Monochrome LCD displaySimultaneously displays flow rate and settings
Digital output signalRS-485 / PROFIBUS
Analog input/output signal0-5 Vdc / 4-20 mA
Electrical signal interfaceDB15
Supply voltage±15VDC, 24VDC
Supply current0.250 Amp0.750 Amp
Operating temperature+10~ +50℃
Maximum operating pressure1 MPa
Installation method/direction requirementsValveless>1U/min range, valve must be installed vertically
Valve classNormally Closed Valve
Protection classIP40
MaterialStainless Steel
  • SI-10FC-L Low-Range Gas Mass Flow Controller Dimensions
    SI-10FC-L Low-Range Gas Mass Flow Controller Dimensions
  • SI-10FC-M Medium-Range Gas Mass Flow Controller Dimensions
    SI-10FC-M Medium-Range Gas Mass Flow Controller Dimensions
  • SI-10FC-B High-Range Gas Mass Flow Controller Dimensions
    SI-10FC-B High-Range Gas Mass Flow Controller Dimensions
  • SI-10FC-B Low Differential Pressure Flow Controller Valve
    SI-10FC-B Low Differential Pressure Flow Controller Valve

Gas Mass Flow Controllers Applications

The SI-10FC series mass flow meters/controllers are widely used in various industries, such as process manufacturing, food analysis, analytical testing and measurement.

Multivariable measurement and a 50:1 adjustable range ratio allow a single SI-10FC gas flow meter and controller to replace the functionality of multiple devices.

1% accuracy, 1% repeatability, and a control response time of less than 200 milliseconds ensure the normal operation of process gases.

Semiconductor Industry Applications

In semiconductor manufacturing processes, mass flow controllers (MFCs) facilitate operations such as cleaning, vapor deposition, heat treatment, and etching. Examples include CVD, etching machines, and high-temperature furnaces.

Taking photolithography as an example, to ensure the quality and performance of semiconductor chips, gases such as hydrogen fluoride, nitrogen, and oxygen must be injected into the reaction chamber at precise flow rates. Each step is strictly controlled to ensure accurate exposure and etching.

In this process, the role of the MFC is particularly crucial, as even minute changes in gas flow can alter the material composition. For semiconductor processes, whether in high-temperature or high-vacuum environments, the MFC needs excellent temperature and pressure stability to ensure accuracy and reliability under various conditions.

Laminar Differential Pressure Mass Flow Controller Principle

Laminar differential pressure mass flow controllers are designed based on the law of conservation of mass, Bernoulli’s equation, and Hagen-Poiseuille’s law. They calculate the mass flow rate of a fluid by measuring the pressure difference across a pipe.

Laminar Flow Differential Pressure Principle: When a fluid flows in a pipe, the faster the fluid velocity, the lower the pressure. The laminar flow differential pressure mass flow controller utilizes this principle by installing two pressure sensors in the pipe to measure the pressure difference between its two ends.

Hagen-Poiseuille’s Law: Under constant parameters such as temperature and pipe diameter, when the gas is in a laminar flow state, the volumetric flow rate can be calculated by acquiring the pressure difference signal across the laminar flow element. Further corrections for temperature and pressure parameters can yield the standard volumetric flow rate.

Rectification Module: Laminar flow mass flow controllers typically include a rectification module. Its function is to convert irregular flow states such as turbulent or transitional flow into laminar flow, ensuring measurement accuracy.

Differential pressure sensor: Two pressure taps are located at the inlet and outlet of the laminar gas flow. A differential pressure sensor is positioned between these taps to acquire the pressure difference between the two taps. This pressure difference allows the determination of the gas velocity in laminar flow, thus providing the gas flow rate.

Technical Support

A gas mass flow controller (MFC) is an instrument used to accurately measure and control the mass flow rate of gases. An MFC not only functions as a mass flow meter, but more importantly, it automatically controls the gas flow rate. The user can set the flow rate as needed, and the MFC automatically maintains the flow rate at the set value. Even if system pressure fluctuates or ambient temperature changes, it will not deviate from the set value.

Simply put, a mass flow controller is a flow stabilizing device; it’s a gas flow stabilizing device that can be manually set or automatically controlled by connecting to a computer.

There are four main concerns when using a mass flow controller:

First, dust. Dust entering the flow meter can clog the sensor and distributor, causing measurement errors. A filter must be installed before the inlet.

Second, liquids and oil entering the MFC can cause loss of control. If a liquid tank is connected to the MFC outlet, a check valve must be added to prevent backflow.

Third, the use of moist, corrosive gases. Moist, corrosive gases can cause stainless steel to rust, damaging the MFC channels. Therefore, the gas and MFC piping system must be dried before using corrosive gases.

Fourth, improper operation when using highly corrosive, flammable, explosive, or toxic gases can lead to product damage and other more serious losses. Correct use and safe operation are paramount for every user.

A mass flow controller (MFC) has a gas flow regulating valve. This valve adjusts the flow rate from zero to the full-scale measurement range. During operation, a pressure drop, or differential pressure, occurs between the controller’s inlet and outlet.

The operating differential pressure range of an MFC is typically 0.1~0.3 MPa. If the differential pressure is below the minimum value (0.1 MPa), the full-scale value may not be reached; if it is above the maximum value (0.3 MPa), the flow rate may not be less than 2% F.S when closed.

When using an MFC, regardless of whether the reaction chamber is under vacuum or high pressure, the user should ensure that the differential pressure between the MFC’s inlet and outlet is maintained within the required range, and the gas pressure should be relatively stable.

Mass flow controllers typically have a small operating differential pressure range. To ensure normal operation under high pressure, three points must be carefully considered:

First, select an MFC that meets the required pressure resistance.

Second, choose a model with a wide operating differential pressure range.

Third, install a pressure reducing valve before the MFC gas path to stabilize the inlet pressure, and a back pressure valve downstream to stabilize the pressure in the reaction chamber and at the MFC outlet. Adjust the pressure reducing and back pressure valves appropriately to ensure the MFC’s operating differential pressure does not exceed the specified range.

By following these three points, the MFC can operate stably under high pressure conditions.

Mass flow controllers (MFCs) can be used to control various gases, including corrosive and specialty gases. However, it is important to note that for corrosive and specialty gases, appropriate model selection and sealing materials are crucial. Users must specify the gas to be used when ordering to the supplier to avoid serious losses due to incorrect model or sealing material selection.

Typically, the wet materials in contact with the working gas in a gas mass flow controller are 316L stainless steel, polytetrafluoroethylene (PTFE), and sealing materials, which are divided into two main categories: metal seals and rubber seals. Metal seals are generally made of corrosion-resistant materials such as stainless steel, gold, or nickel.

In principle, metal-sealed MFCs can be used for any gas, including various corrosive and specialty gases.

For highly corrosive gases such as boron tribromide, boron trichloride, and hydrogen fluoride, and metal oxide gases used in MOCVD, metal-sealed MFCs are recommended.

Because metal-sealed MFCs are more expensive, rubber-sealed MFCs are typically used in applications with less stringent requirements. Unless otherwise specified, MFCs use fluororubber seals, making them suitable for most acidic and alkaline corrosive gases, such as halogenated drying gases like hydrogen chloride.

Other special corrosive gases require the use of specialized rubbers. Ammonia requires ammonia-resistant rubber, such as ethylene propylene rubber, chloroprene rubber, or nitrile rubber. Organic solvent vapors (acetone, toluene, etc.) require silicone rubber. Boron tribromide, boron trichloride, hydrogen fluoride, etc., require perfluororubber.

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Unlike thermal flow meters, the SI-10FC Gas Mass Flow Controllers do not have an additional “specific heat capacity” error when using gas conversion coefficients. Therefore, even if the measured gas differs from the factory calibration gas, it will not affect the measurement accuracy.

The main application scenarios for Sino-Inst laminar flow gas mass flow controllers are in equipment and process production sites of high-end manufacturing industries, and also serve scientific and engineering research. In these application scenarios, the gas is mostly relatively clean, and the flow rate is in the small to medium range. Therefore, in the future process of global industrial chain upgrading and the continuous booming development of high-end manufacturing, laminar flow gas mass flow controllers/flow meters will become a very suitable choice.

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SI-10FC Gas Mass Flow Controller with Laminar DP Technology

A gas mass flow controller (MFC) is an instrument used to accurately measure and control the mass flow rate of gases. An MFC not only functions as a mass flow meter, but more importantly, it automatically controls the gas flow rate. The user can set the flow rate as needed, and the MFC automatically maintains the flow rate at the set value. Even if system pressure fluctuates or ambient temperature changes, it will not deviate from the set value.

Product SKU: SI-10FC Gas Mass Flow Controller with Laminar Differential Pressure (DP) Technology

Product Brand: Sino-Inst

Price Valid Until: 2099-09-09

Product In-Stock: PreOrder

Editor's Rating:
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